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Micro-scale Electrostatic Attach-detach Device for Self-rec..:

, In: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP),
Misumi, Kei ; Ulliac, Gwenn ; Usami, Naoto... - p. 1-4 , 2020
Link: https://doi.org/10.1109/DTIP51112.2020.9139129