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Design and Fabrication of High Performance Resonant Micro-M..:

, In: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP),
Farrugia, Russell ; Portelli, Barnaby ; Grech, Ivan... - p. 1-6 , 2020
Link: https://doi.org/10.1109/DTIP51112.2020.9139143