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1 Ergebnisse
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Preparation of Germanium-on-insulator (GOI) wafers by means..:
, In:
2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
,
Lisker, Marco
;
Kruger, Andreas
;
Kruger, Patrick
... - p. 1-4 , 2020
Link:
https://doi.org/10.1109/DTIP51112.2020.9139149
RT T1
2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
: T1
Preparation of Germanium-on-insulator (GOI) wafers by means of layer transfer tehnique
UL https://suche.suub.uni-bremen.de/peid=ieee-9139149&Exemplar=1&LAN=DE A1 Lisker, Marco A1 Kruger, Andreas A1 Kruger, Patrick A1 Voss, Thomas A1 Lukose, Rasuole A1 Yamamoto, Yuji A1 Fursenko, Oksana A1 Wietstruck, Matthias A1 Kaynak, Mehmet YR 2020 K1 GOI K1 wafer bonding K1 layer transfer K1 grinding K1 CMP SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/DTIP51112.2020.9139149 DO https://doi.org/10.1109/DTIP51112.2020.9139149 SF ELIB - SuUB Bremen
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