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An Analysis of Temperature Variation Effect on Response and..:
, In:
2020 36th Semiconductor Thermal Measurement, Modeling & Management Symposium (SEMI-THERM)
,
Nazdrowicz, Jacek
;
Napieralski, Andrzej
- p. 91-96 , 2020
Link:
https://doi.org/10.23919/SEMI-THERM50369.2020.9142836
RT T1 <cTitle>2020 36th Semiconductor Thermal Measurement, Modeling & Management Symposium (SEMI-THERM)</cTitle>: T1 <Title>An Analysis of Temperature Variation Effect on Response and Performance of Capacitive Microaccelerometer Inertial Sensors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9142836&Exemplar=1&LAN=DE A1 Nazdrowicz, Jacek A1 Napieralski, Andrzej YR 2020 K1 Temperature sensors K1 Capacitance K1 Electrodes K1 Accelerometers K1 Temperature measurement K1 Acceleration K1 MEMS K1 accelerometer K1 inertial sensor K1 capacitances SP 91 OP 96 LK http://dx.doi.org/https://doi.org/10.23919/SEMI-THERM50369.2020.9142836 DO https://doi.org/10.23919/SEMI-THERM50369.2020.9142836 SF ELIB - SuUB Bremen
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