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Demonstration of a collective hybrid die-to-wafer integrati..:
, In:
2020 IEEE 70th Electronic Components and Technology Conference (ECTC)
,
Suhard, Samuel
;
Phommahaxay, Alain
;
Kennes, Koen
... - p. 1315-1321 , 2020
Link:
https://doi.org/10.1109/ECTC32862.2020.00208
RT T1
2020 IEEE 70th Electronic Components and Technology Conference (ECTC)
: T1
Demonstration of a collective hybrid die-to-wafer integration
UL https://suche.suub.uni-bremen.de/peid=ieee-9159396&Exemplar=1&LAN=DE A1 Suhard, Samuel A1 Phommahaxay, Alain A1 Kennes, Koen A1 Bex, Pieter A1 Fodor, Ferenc A1 Liebens, Maarten A1 Slabbekoorn, John A1 Miller, Andy A1 Beyer, Gerald A1 Beyne, Eric YR 2020 SN 2377-5726 K1 Bonding K1 Tools K1 Resists K1 Wafer bonding K1 Inspection K1 Strips K1 Silicon K1 Die to wafer K1 collective hybrid bonding K1 wafer to wafer bonding SP 1315 OP 1321 LK http://dx.doi.org/https://doi.org/10.1109/ECTC32862.2020.00208 DO https://doi.org/10.1109/ECTC32862.2020.00208 SF ELIB - SuUB Bremen
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