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Heterogenous Integration of MEMS Gas Sensor using FOWLP : P..:

, In: 2020 IEEE 70th Electronic Components and Technology Conference (ECTC),
Benedict, Samatha ; Nagarajan, Ashvin ; K, Thejas... - p. 824-828 , 2020
Link: https://doi.org/10.1109/ECTC32862.2020.00134