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Method for improving stability of plasma ignition in a mult..:

, In: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Gruss-Gifford, Jessica ; Mehta, Virat ; Straten, Oscar van der... - p. 1-4 , 2020
Link: https://doi.org/10.1109/ASMC49169.2020.9185236