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1 Ergebnisse
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Characteristics of SiGe Oxidation and Ge Loss according to ..:
, In:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Kwon, Meejung
;
Han, SongI
;
Ryu, Je Hyeok
... - p. 1-4 , 2020
Link:
https://doi.org/10.1109/ASMC49169.2020.9185260
RT T1
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
Characteristics of SiGe Oxidation and Ge Loss according to Ge Content
UL https://suche.suub.uni-bremen.de/peid=ieee-9185260&Exemplar=1&LAN=DE A1 Kwon, Meejung A1 Han, SongI A1 Ryu, Je Hyeok A1 Lee, Chiyoung A1 Lee, Yoon Young A1 Kim, Byung Hoon YR 2020 SN 2376-6697 K1 Oxidation K1 Plasmas K1 Silicon germanium K1 Strips K1 Hydrogen K1 Epitaxial growth K1 Surface treatment K1 dry strip process K1 silicon germanium K1 oxidation K1 germanium loss K1 inductively-coupled plasma K1 hydrogen plasma SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC49169.2020.9185260 DO https://doi.org/10.1109/ASMC49169.2020.9185260 SF ELIB - SuUB Bremen
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