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Particle Defect Reduction Through YF3 Coated Remote Plasma ..:

, In: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Seo, Hyojeong ; Yang, Jeonghye ; Ma, Young Jae... - p. 1-5 , 2020
Link: https://doi.org/10.1109/ASMC49169.2020.9185300