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Impact of Asymmetric Memory Hole Profile on Silicon Selecti..:

, In: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Chang, Yao-Yuan ; Yang, Zusing ; Wu, Ming-Tsung... - p. 1-4 , 2020
Link: https://doi.org/10.1109/ASMC49169.2020.9185381