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1
Analysis of Temperature Variation Influence on Capacitance ..:
, In:
2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)
,
Nazdrowicz, Jacek
;
Napieralski, Andrzej
- p. 1364-1373 , 2020
Link:
https://doi.org/10.1109/ITherm45881.2020.9190506
RT T1 <cTitle>2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)</cTitle>: T1 <Title>Analysis of Temperature Variation Influence on Capacitance Inertial Sensors Parameters</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9190506&Exemplar=1&LAN=DE A1 Nazdrowicz, Jacek A1 Napieralski, Andrzej YR 2020 SN 2577-0799 K1 Capacitance K1 Electrodes K1 Temperature sensors K1 Temperature measurement K1 Micromechanical devices K1 Acceleration K1 MEMS K1 accelerometer K1 vibratory gyroscope K1 thermal expansion K1 temperature effect K1 capacitance SP 1364 OP 1373 LK http://dx.doi.org/https://doi.org/10.1109/ITherm45881.2020.9190506 DO https://doi.org/10.1109/ITherm45881.2020.9190506 SF ELIB - SuUB Bremen
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