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1 Ergebnisse
1
Microfabrication Challenges for Silicon-based Large Area (>..:
, In:
2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)
,
Hazra, Sougata
;
Piazza, Alisha
;
Jung, Ki Wook
... - p. 83-90 , 2020
Link:
https://doi.org/10.1109/ITherm45881.2020.9190541
RT T1 <cTitle>2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)</cTitle>: T1 <Title>Microfabrication Challenges for Silicon-based Large Area (>500 mm2) 3D-manifolded Embedded Microcooler Devices for High Heat Flux Removal</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9190541&Exemplar=1&LAN=DE A1 Hazra, Sougata A1 Piazza, Alisha A1 Jung, Ki Wook A1 Asheghi, Mehdi A1 Gupta, Man Prakash A1 Jih, Edward A1 Degner, Mike A1 Goodson, Kenneth E. YR 2020 SN 2577-0799 K1 Manifolds K1 Silicon K1 Etching K1 Cold plates K1 Fabrication K1 Microchannels K1 microcooler K1 DRIE K1 etch K1 fabrication K1 3D- manifold K1 cooling K1 Bosch K1 Black Silicon K1 Brown Silicon K1 micromasking SP 83 OP 90 LK http://dx.doi.org/https://doi.org/10.1109/ITherm45881.2020.9190541 DO https://doi.org/10.1109/ITherm45881.2020.9190541 SF ELIB - SuUB Bremen
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