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1 Ergebnisse
1
Temperature Hysteresis Effect of Q-factor in Vacuum Package..:
, In:
2020 21st International Conference on Electronic Packaging Technology (ICEPT)
,
Dong, Xianshan
;
Huang, Qinwen
;
Lai, Ping
... - p. 1-5 , 2020
Link:
https://doi.org/10.1109/ICEPT50128.2020.9202928
RT T1
2020 21st International Conference on Electronic Packaging Technology (ICEPT)
: T1
Temperature Hysteresis Effect of Q-factor in Vacuum Packaged MEMS Device
UL https://suche.suub.uni-bremen.de/peid=ieee-9202928&Exemplar=1&LAN=DE A1 Dong, Xianshan A1 Huang, Qinwen A1 Lai, Ping A1 Yang, Shaohua A1 Su, Wei A1 Huang, Yun YR 2020 K1 Temperature K1 Q-factor K1 Hysteresis K1 Micromechanical devices K1 Temperature measurement K1 Packaging K1 Gyroscopes K1 Vacuum Packaging K1 Temperature Hysteresis K1 MEMS Device SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ICEPT50128.2020.9202928 DO https://doi.org/10.1109/ICEPT50128.2020.9202928 SF ELIB - SuUB Bremen
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