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Deposition of High Thermal Conductivity AlN Heat Spreader F..:

, In: 2020 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA),
Ueda, Scott T. ; McLeod, Aaron ; Chen, Michelle... - p. 110-111 , 2020
Link: https://doi.org/10.1109/VLSI-TSA48913.2020.9203721