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1 Ergebnisse
1
A Switched-Mode Power Amplifier for Ion Energy Control In P..:
, In:
2020 22nd European Conference on Power Electronics and Applications (EPE'20 ECCE Europe)
,
Yu, Qihao
;
Lemmen, Erik
;
Wijnands, Korneel
. - p. P.1-P.8 , 2020
Link:
https://doi.org/10.23919/EPE20ECCEEurope43536.2020.921..
RT T1
2020 22nd European Conference on Power Electronics and Applications (EPE'20 ECCE Europe)
: T1
A Switched-Mode Power Amplifier for Ion Energy Control In Plasma Etching
UL https://suche.suub.uni-bremen.de/peid=ieee-9215859&Exemplar=1&LAN=DE A1 Yu, Qihao A1 Lemmen, Erik A1 Wijnands, Korneel A1 Vermulst, Bas YR 2020 K1 Etching K1 Ions K1 Substrates K1 Plasmas K1 Discharges (electric) K1 Switches K1 «Physics research» K1 «Industrial application» K1 «Amplifiers» K1 «Plasma» SP P.1 OP P.8 LK http://dx.doi.org/https://doi.org/10.23919/EPE20ECCEEurope43536.2020.9215859 DO https://doi.org/10.23919/EPE20ECCEEurope43536.2020.9215859 SF ELIB - SuUB Bremen
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