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1 Ergebnisse
1
MOCVD Al(Ga)N Insulator for Alternative Silicon-On-Insulato..:
, In:
2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC)
,
Ross, Glenn
;
Luntinen, Ville
;
Broas, Mikael
... - p. 1-6 , 2020
Link:
https://doi.org/10.1109/ESTC48849.2020.9229836
RT T1 <cTitle>2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC)</cTitle>: T1 <Title>MOCVD Al(Ga)N Insulator for Alternative Silicon-On-Insulator Structure</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9229836&Exemplar=1&LAN=DE A1 Ross, Glenn A1 Luntinen, Ville A1 Broas, Mikael A1 Suihkonen, Sami A1 Tuomi, Turkka A1 Lankinen, Aapo A1 Danilewsky, Andreas A1 Tilli, Markku A1 Paulasto-Krockel, Mervi YR 2020 K1 silicon-on-insulator K1 dielectric K1 metalorganic chemical vapor deposition K1 direct bonding K1 aluminum nitride K1 aluminum gallium nitride K1 tensile tests K1 transmission electron microscopy K1 synchrotron x-ray diffraction topography SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ESTC48849.2020.9229836 DO https://doi.org/10.1109/ESTC48849.2020.9229836 SF ELIB - SuUB Bremen
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