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Photothermal Frequency Response Characterization of Large D..:
, In:
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
,
Hall, Harris J.
;
McDaniel, Sean
;
Torres, David
.. - p. 1-4 , 2020
Link:
https://doi.org/10.1109/IFCS-ISAF41089.2020.9234891
RT T1 <cTitle>2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)</cTitle>: T1 <Title>Photothermal Frequency Response Characterization of Large Deformation Multi-layer Thin Film Structures</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9234891&Exemplar=1&LAN=DE A1 Hall, Harris J. A1 McDaniel, Sean A1 Torres, David A1 Shah, Piyush A1 Starman, LaVern YR 2020 SN 2375-0448 K1 photothermal actuation K1 micro-optics K1 MEMS SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IFCS-ISAF41089.2020.9234891 DO https://doi.org/10.1109/IFCS-ISAF41089.2020.9234891 SF ELIB - SuUB Bremen
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