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1 Ergebnisse
1
Ferroelectric C-Axis Textured Aluminum Scandium Nitride Thi..:
, In:
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
,
Wang, Dixiong
;
Zheng, Jeffrey
;
Tang, Zichen
... - p. 1-4 , 2020
Link:
https://doi.org/10.1109/IFCS-ISAF41089.2020.9234910
RT T1
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
: T1
Ferroelectric C-Axis Textured Aluminum Scandium Nitride Thin Films of 100 nm Thickness
UL https://suche.suub.uni-bremen.de/peid=ieee-9234910&Exemplar=1&LAN=DE A1 Wang, Dixiong A1 Zheng, Jeffrey A1 Tang, Zichen A1 D'Agati, Michael A1 Gharavi, Paria S. M. A1 Liu, Xiwen A1 Jariwala, Deep A1 Stach, Eric A. A1 Olsson, Roy H. A1 Roebisch, Volker A1 Kratzer, Martin A1 Heinz, Bernd A1 Han, Myung-Geun A1 Kisslinger, Kim YR 2020 SN 2375-0448 K1 Aluminum Scandium Nitride K1 piezoelectric material K1 ferroelectric material K1 ferroelectric memory SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IFCS-ISAF41089.2020.9234910 DO https://doi.org/10.1109/IFCS-ISAF41089.2020.9234910 SF ELIB - SuUB Bremen
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