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1
TCAD Modeling and Optimization of 28nm HKMG ESF3 Flash Memo..:
, In:
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
,
Zaka, Alban
;
Herrmann, Tom
;
Richter, Ralf
.. - p. 169-172 , 2020
Link:
https://doi.org/10.23919/SISPAD49475.2020.9241647
RT T1 <cTitle>2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)</cTitle>: T1 <Title>TCAD Modeling and Optimization of 28nm HKMG ESF3 Flash Memory</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9241647&Exemplar=1&LAN=DE A1 Zaka, Alban A1 Herrmann, Tom A1 Richter, Ralf A1 Duenkel, Stefan A1 Jain, Ruchil YR 2020 SN 1946-1577 K1 Semiconductor device modeling K1 Microprocessors K1 Computer architecture K1 Hot carrier injection K1 Semiconductor process modeling K1 Transient analysis K1 Optimization K1 ESF3 K1 TCAD K1 Hot Carrier Modeling SP 169 OP 172 LK http://dx.doi.org/https://doi.org/10.23919/SISPAD49475.2020.9241647 DO https://doi.org/10.23919/SISPAD49475.2020.9241647 SF ELIB - SuUB Bremen
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