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1 Ergebnisse
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Advanced simulations on laser annealing: explosive crystall..:
, In:
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
,
Sciuto, Alberto
;
Deretzis, Ioannis
;
Fisicaro, Giuseppe
... - p. 71-74 , 2020
Link:
https://doi.org/10.23919/SISPAD49475.2020.9241660
RT T1 <cTitle>2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)</cTitle>: T1 <Title>Advanced simulations on laser annealing: explosive crystallization and phonon transport corrections</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9241660&Exemplar=1&LAN=DE A1 Sciuto, Alberto A1 Deretzis, Ioannis A1 Fisicaro, Giuseppe A1 Lombardo, Salvatore F. A1 Magna, Antonino La A1 Grimaldi, Maria Grazia A1 Huet, Karim A1 Lespinasse, Bobby A1 Verstraete, Armand A1 Curvers, Benoit A1 Bejenari, Igor A1 Burenkov, Alexander A1 Pichler, Peter YR 2020 SN 1946-1577 K1 Semiconductor lasers K1 Crystallization K1 Simulated annealing K1 Laser modes K1 Explosives K1 Semiconductor process modeling K1 Numerical models SP 71 OP 74 LK http://dx.doi.org/https://doi.org/10.23919/SISPAD49475.2020.9241660 DO https://doi.org/10.23919/SISPAD49475.2020.9241660 SF ELIB - SuUB Bremen
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