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Stiction Fault in MEMS Comb Drive Resonator:

, In: 2020 15th IEEE Conference on Industrial Electronics and Applications (ICIEA),
Dharmadhikari, Bhushan ; Patel, Sarosh H ; Sobh, Tarek - p. 888-892 , 2020
Link: https://doi.org/10.1109/ICIEA48937.2020.9248114