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1 Ergebnisse
1
Wafer-scale Fabrication of Nanometer Silicon Posts for Capa..:
, In:
2020 IEEE International Ultrasonics Symposium (IUS)
,
Kim, Hae Youn
;
Kang, Dong-Hyun
;
Kim, Jinsik
.. - p. 1-4 , 2020
Link:
https://doi.org/10.1109/IUS46767.2020.9251528
RT T1
2020 IEEE International Ultrasonics Symposium (IUS)
: T1
Wafer-scale Fabrication of Nanometer Silicon Posts for Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs
UL https://suche.suub.uni-bremen.de/peid=ieee-9251528&Exemplar=1&LAN=DE A1 Kim, Hae Youn A1 Kang, Dong-Hyun A1 Kim, Jinsik A1 Khuri-Yakub, Butrus T. A1 Lee, Byung Chul YR 2020 SN 1948-5727 K1 Fabrication K1 Ultrasonic transducers K1 Ultrasonic variables measurement K1 Silicon K1 Acoustics K1 Springs K1 Substrates K1 Capacitive micromachined ultrasonic transducer K1 Nanometer silicon posts K1 Wafer-scale K1 size-reduction process SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IUS46767.2020.9251528 DO https://doi.org/10.1109/IUS46767.2020.9251528 SF ELIB - SuUB Bremen
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