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1 Ergebnisse
1
Large Scale High Voltage 192+192 Row-Column Addressed CMUTs..:
, In:
2020 IEEE International Ultrasonics Symposium (IUS)
,
Grass, Rune Sixten
;
Steenberg, Kitty
;
Havreland, Andreas Spandet
.. - p. 1-4 , 2020
Link:
https://doi.org/10.1109/IUS46767.2020.9251824
RT T1
2020 IEEE International Ultrasonics Symposium (IUS)
: T1
Large Scale High Voltage 192+192 Row-Column Addressed CMUTs Made with Anodic Bonding
UL https://suche.suub.uni-bremen.de/peid=ieee-9251824&Exemplar=1&LAN=DE A1 Grass, Rune Sixten A1 Steenberg, Kitty A1 Havreland, Andreas Spandet A1 Engholm, Mathias A1 Thomsen, Erik Vilain YR 2020 SN 1948-5727 K1 Fabrication K1 Electrodes K1 Voltage measurement K1 Resonant frequency K1 Silicon nitride K1 High-voltage techniques K1 Bonding SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IUS46767.2020.9251824 DO https://doi.org/10.1109/IUS46767.2020.9251824 SF ELIB - SuUB Bremen
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