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1 Ergebnisse
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Investigation on the Impact of Scandium-doping on the kt2 o..:
, In:
2020 IEEE International Ultrasonics Symposium (IUS)
,
Giribaldi, Gabriel
;
Colombo, Luca
;
Bersano, Fabio
.. - p. 1-4 , 2020
Link:
https://doi.org/10.1109/IUS46767.2020.9251829
RT T1
2020 IEEE International Ultrasonics Symposium (IUS)
: T1
Investigation on the Impact of Scandium-doping on the kt2 of ScxAl1-xN Cross-sectional Lamé Mode Resonators
UL https://suche.suub.uni-bremen.de/peid=ieee-9251829&Exemplar=1&LAN=DE A1 Giribaldi, Gabriel A1 Colombo, Luca A1 Bersano, Fabio A1 Cassella, Cristian A1 Rinaldi, Matteo YR 2020 SN 1948-5727 K1 Electrodes K1 Piezoelectric films K1 Doping K1 III-V semiconductor materials K1 Resonators K1 Optimization K1 Aluminum nitride K1 5G K1 RF MEMS K1 CLMR K1 ScAlN SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IUS46767.2020.9251829 DO https://doi.org/10.1109/IUS46767.2020.9251829 SF ELIB - SuUB Bremen
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