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1 Ergebnisse
1
Defect and Contamination Analysis Necessity with Multiple S..:
, In:
2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Zhu, Lei
;
Sek, Caryn
;
Goh, Jun Xian
... - p. 1-3 , 2020
Link:
https://doi.org/10.1109/IPFA49335.2020.9260748
RT T1
2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Defect and Contamination Analysis Necessity with Multiple Surface Analytical Techniques
UL https://suche.suub.uni-bremen.de/peid=ieee-9260748&Exemplar=1&LAN=DE A1 Zhu, Lei A1 Sek, Caryn A1 Goh, Jun Xian A1 Kee, Yeh Yee A1 Pan, Jing Fang A1 Zhao, Yanfei A1 Hua, Younan A1 Li, Xiaomin YR 2020 SN 1946-1550 K1 Frequency modulation K1 Surface contamination K1 Ions K1 Surface morphology K1 Substrates K1 Sensitivity K1 Surface treatment K1 contamination K1 defects K1 multiple surface analytical techniques SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IPFA49335.2020.9260748 DO https://doi.org/10.1109/IPFA49335.2020.9260748 SF ELIB - SuUB Bremen
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