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1 Ergebnisse
1
Vision based EBR Metrology for Edge Bead Removal Optimizati..:
, In:
2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Hyun, Seung Hwa
;
Cho, Doo-Hyun
;
Park, Wan Sung
. - p. 1-5 , 2020
Link:
https://doi.org/10.1109/IPFA49335.2020.9260890
RT T1 <cTitle>2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)</cTitle>: T1 <Title>Vision based EBR Metrology for Edge Bead Removal Optimization</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9260890&Exemplar=1&LAN=DE A1 Hyun, Seung Hwa A1 Cho, Doo-Hyun A1 Park, Wan Sung A1 Kim, Tae Joong YR 2020 SN 1946-1550 K1 Image edge detection K1 Process control K1 Feedback control K1 Resists K1 Inspection K1 Substrates K1 Semiconductor device measurement K1 Edge Bead Removal K1 Metrology K1 Process Control K1 Photoresist SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/IPFA49335.2020.9260890 DO https://doi.org/10.1109/IPFA49335.2020.9260890 SF ELIB - SuUB Bremen
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