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Development of the Next Generation Microshutter Arrays for ..:

, In: 2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS),
Chang, Meng-Ping ; Brekosky, Regis P. ; Brown, Ari D.... - p. 89-92 , 2020
Link: https://doi.org/10.1109/NEMS50311.2020.9265604