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UV-LED Lithography System and Characterization:

, In: 2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS),
Shiba, Sabera Fahmida ; Beavers, Jace ; Laramore, Diego... - p. 73-76 , 2020
Link: https://doi.org/10.1109/NEMS50311.2020.9265607