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1 Ergebnisse
1
A MEMS Based Electrochemical Rotational Vibration Sensor:
, In:
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)
,
Liu, Bowen
;
Wang, Junbo
;
Chen, Deyong
... - p. 63-66 , 2020
Link:
https://doi.org/10.1109/NEMS50311.2020.9265612
RT T1 <cTitle>2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)</cTitle>: T1 <Title>A MEMS Based Electrochemical Rotational Vibration Sensor</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9265612&Exemplar=1&LAN=DE A1 Liu, Bowen A1 Wang, Junbo A1 Chen, Deyong A1 Chen, Jian A1 Xu, Chao A1 Liang, Tian A1 Qi, Wenjie A1 She, Xu YR 2020 SN 2474-3755 K1 Vibrations K1 Electrodes K1 Micromechanical devices K1 Electrolytes K1 Sensitivity K1 Fabrication K1 Acceleration SP 63 OP 66 LK http://dx.doi.org/https://doi.org/10.1109/NEMS50311.2020.9265612 DO https://doi.org/10.1109/NEMS50311.2020.9265612 SF ELIB - SuUB Bremen
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