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1 Ergebnisse
1
Scaling Effect Induced Rapid Quenching Improves the Perform..:
, In:
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)
,
Ren, Hao
;
Wang, Weimin
;
Cao, Haichao
... - p. 545-548 , 2020
Link:
https://doi.org/10.1109/NEMS50311.2020.9265626
RT T1 <cTitle>2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)</cTitle>: T1 <Title>Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9265626&Exemplar=1&LAN=DE A1 Ren, Hao A1 Wang, Weimin A1 Cao, Haichao A1 Fei, Sitao A1 Niu, Yunping A1 Li, Zhihao YR 2020 SN 2474-3755 K1 Conferences K1 Biosensors K1 Sensor systems and applications K1 Nanofluidics K1 Microfluidics K1 Microfabrication K1 Mechanical sensors SP 545 OP 548 LK http://dx.doi.org/https://doi.org/10.1109/NEMS50311.2020.9265626 DO https://doi.org/10.1109/NEMS50311.2020.9265626 SF ELIB - SuUB Bremen
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