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1 Ergebnisse
1
Hybrid Si Etching for Performance Enhancement of the Atmosp..:
, In:
2020 IEEE Sensors
,
Lin, Pen-Sheng
;
Wang, Yijia
;
Cheng, Ming-Ching
... - p. 1-4 , 2020
Link:
https://doi.org/10.1109/SENSORS47125.2020.9278644
RT T1
2020 IEEE Sensors
: T1
Hybrid Si Etching for Performance Enhancement of the Atmospheric CMOS MEMS Infrared Sensor
UL https://suche.suub.uni-bremen.de/peid=ieee-9278644&Exemplar=1&LAN=DE A1 Lin, Pen-Sheng A1 Wang, Yijia A1 Cheng, Ming-Ching A1 Chen, Yu-Chen A1 Huang, Yu-Cheng A1 Fang, Weileun YR 2020 SN 2168-9229 K1 Sensors K1 Etching K1 Thermal sensors K1 Micromechanical devices K1 Silicon K1 Thermal resistance K1 Temperature sensors K1 CMOS-MEMS K1 DRIE K1 infrared sensor K1 XeF2 SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/SENSORS47125.2020.9278644 DO https://doi.org/10.1109/SENSORS47125.2020.9278644 SF ELIB - SuUB Bremen
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