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1 Ergebnisse
1
Effect of Implant Beam Current on Resistance of BF2 Implant..:
, In:
2020 China Semiconductor Technology International Conference (CSTIC)
,
Zong, Lichao
;
Liu, Chunling
;
Wang, Xingjie
. - p. 1-3 , 2020
Link:
https://doi.org/10.1109/CSTIC49141.2020.9282404
RT T1 <cTitle>2020 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Effect of Implant Beam Current on Resistance of BF2 Implanted Polysilicon</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9282404&Exemplar=1&LAN=DE A1 Zong, Lichao A1 Liu, Chunling A1 Wang, Xingjie A1 Chen, Liming YR 2020 K1 Resistance K1 Grain size K1 Temperature dependence K1 Temperature K1 Correlation K1 Annealing K1 Implants K1 Polysilicon K1 Implant K1 BF2 K1 Beam current SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC49141.2020.9282404 DO https://doi.org/10.1109/CSTIC49141.2020.9282404 SF ELIB - SuUB Bremen
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