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1 Ergebnisse
1
Effect of Potassium Salts on the Chemical Mechanical Polish..:
, In:
2020 China Semiconductor Technology International Conference (CSTIC)
,
Lu, Yanan
;
Niu, Xinhuan
;
Cui, Yaqi
... - p. 1-3 , 2020
Link:
https://doi.org/10.1109/CSTIC49141.2020.9282406
RT T1 <cTitle>2020 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Effect of Potassium Salts on the Chemical Mechanical Polishing Efficiency of Sapphire Substrate</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9282406&Exemplar=1&LAN=DE A1 Lu, Yanan A1 Niu, Xinhuan A1 Cui, Yaqi A1 Zhao, Xin A1 Huo, Zhaoqing A1 Yang, Chenghui YR 2020 K1 Surface morphology K1 Light emitting diodes K1 Surface roughness K1 Rough surfaces K1 Potassium K1 Substrates K1 Chemicals K1 chemical mechanical polishing(CMP) K1 sapphire K1 potassium salts K1 removal rate SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC49141.2020.9282406 DO https://doi.org/10.1109/CSTIC49141.2020.9282406 SF ELIB - SuUB Bremen
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