I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Monitoring Critical Process Steps in 3D NAND using Picoseco..:
, In:
2020 China Semiconductor Technology International Conference (CSTIC)
,
Dai, Johnny
;
Mukundhan, Priya
;
Mair, Robin
... - p. 1-3 , 2020
Link:
https://doi.org/10.1109/CSTIC49141.2020.9282409
RT T1 <cTitle>2020 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Monitoring Critical Process Steps in 3D NAND using Picosecond Ultrasonic Metrology with both Thickness and Sound Velocity Capabilities</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9282409&Exemplar=1&LAN=DE A1 Dai, Johnny A1 Mukundhan, Priya A1 Mair, Robin A1 Mehendale, Manjusha A1 Wang, Calvin A1 Wang, Ewen A1 Kim, Cheolkyu YR 2020 K1 Semiconductor device measurement K1 Ultrasonic variables measurement K1 Metals K1 Acoustics K1 Velocity measurement K1 Carbon K1 Thickness measurement SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC49141.2020.9282409 DO https://doi.org/10.1109/CSTIC49141.2020.9282409 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
