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Study of Alignment & Overlay Strategy in 14 nm Lithography ..:

, In: 2020 China Semiconductor Technology International Conference (CSTIC),
Lai, Lulu ; Qian, Rui ; Liu, Biqiu... - p. 1-3 , 2020
Link: https://doi.org/10.1109/CSTIC49141.2020.9282422