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Enlarge Process Window of BSI in DTI Loop: A Novel OPC Appr..:

, In: 2020 China Semiconductor Technology International Conference (CSTIC),
Yanhui, Qiao ; Baoxuan, Li ; Dan, Wan.. - p. 1-3 , 2020
Link: https://doi.org/10.1109/CSTIC49141.2020.9282428