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1 Ergebnisse
1
Investigation and Discovery of the Integration of FEOL Proc..:
, In:
2020 China Semiconductor Technology International Conference (CSTIC)
,
Pan, Fengjia
;
Chen, Hunglin
;
Long, Yin
.. - p. 1-3 , 2020
Link:
https://doi.org/10.1109/CSTIC49141.2020.9282435
RT T1
2020 China Semiconductor Technology International Conference (CSTIC)
: T1
Investigation and Discovery of the Integration of FEOL Process by Electron Beam Inspections
UL https://suche.suub.uni-bremen.de/peid=ieee-9282435&Exemplar=1&LAN=DE A1 Pan, Fengjia A1 Chen, Hunglin A1 Long, Yin A1 Wang, Kai A1 Guo, Hao YR 2020 K1 Fabrication K1 Electron beams K1 Silicides K1 Process control K1 Inspection K1 Plasmas K1 Surface treatment K1 e-beam inspection methodology K1 defect detection K1 EBI (electron beam inspection) K1 poly CD (Critical Dimension) K1 process window control K1 integration of FEOL (front-end-of-line) SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC49141.2020.9282435 DO https://doi.org/10.1109/CSTIC49141.2020.9282435 SF ELIB - SuUB Bremen
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