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1 Ergebnisse
1
The Investigation of Domestic Machines Large-Scale Producti..:
, In:
2020 China Semiconductor Technology International Conference (CSTIC)
,
Yaoting, Shen
;
Lan, Jiang
;
Yan, Gui
... - p. 1-3 , 2020
Link:
https://doi.org/10.1109/CSTIC49141.2020.9282456
RT T1 <cTitle>2020 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>The Investigation of Domestic Machines Large-Scale Production in Soak Anneal Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9282456&Exemplar=1&LAN=DE A1 Yaoting, Shen A1 Lan, Jiang A1 Yan, Gui A1 Qingwei, Dong A1 Kechen, Chen A1 Xinhua, Cheng A1 Jingxun, Fang YR 2020 K1 Rapid thermal annealing K1 Temperature distribution K1 Rapid thermal processing K1 Thermal resistance K1 Production K1 Tools K1 Qualifications SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC49141.2020.9282456 DO https://doi.org/10.1109/CSTIC49141.2020.9282456 SF ELIB - SuUB Bremen
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