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1 Ergebnisse
1
Etching Polymer Technology for Large Number of Small VIA:
, In:
2020 China Semiconductor Technology International Conference (CSTIC)
,
Lee, Kyu Jin
;
You, Moon Sang
;
Kim, Gun Woo
... - p. 1-4 , 2020
Link:
https://doi.org/10.1109/CSTIC49141.2020.9282483
RT T1
2020 China Semiconductor Technology International Conference (CSTIC)
: T1
Etching Polymer Technology for Large Number of Small VIA
UL https://suche.suub.uni-bremen.de/peid=ieee-9282483&Exemplar=1&LAN=DE A1 Lee, Kyu Jin A1 You, Moon Sang A1 Kim, Gun Woo A1 Han, Hyun Chul A1 Ahn, Sang Ki A1 Lee, Ken A1 Jeong, Woo Jae A1 Ahn, Jeong Hyuk A1 Moon, Jeong Wook A1 Hwang, Jee Hyeon A1 Lee, Kwang Joo YR 2020 K1 Micrometers K1 Insulation K1 Etching K1 Resins K1 Polymers K1 Integrated circuit reliability K1 Substrates K1 small via K1 etching type polymer K1 laser free substrate K1 photo via SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC49141.2020.9282483 DO https://doi.org/10.1109/CSTIC49141.2020.9282483 SF ELIB - SuUB Bremen
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