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Pattern Roughness Analyses in Advanced Lithography: Power S..:

, In: 2020 International Workshop on Advanced Patterning Solutions (IWAPS),
Bian, Yuyang ; Guan, Xijun ; Liu, Biqiu... - p. 1-4 , 2020
Link: https://doi.org/10.1109/IWAPS51164.2020.9286797