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Resonant micro-mirror electrical characterisation towards t..:

, In: 2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS),
Portelli, Barnaby ; Grech, Ivan ; Micallef, Joseph... - p. 1-4 , 2020
Link: https://doi.org/10.1109/ICECS49266.2020.9294818