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Effects of Initial Stress on SiGe Capacitive Pressure Senso:

, In: 2020 IEEE Eurasia Conference on IOT, Communication and Engineering (ECICE),
Li, Jen-Chieh ; Ho, Shin-Jin ; Sue, Chung-Yang - p. 118-120 , 2020
Link: https://doi.org/10.1109/ECICE50847.2020.9302024