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1 Ergebnisse
1
Laser Processing For 3D Junctionless Transistor Fabrication:
, In:
2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)
,
Bosch, D.
;
Alba, P. Acosta
;
Kerdiles, S.
... - p. 1-3 , 2019
Link:
https://doi.org/10.1109/S3S46989.2019.9320642
RT T1 <cTitle>2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)</cTitle>: T1 <Title>Laser Processing For 3D Junctionless Transistor Fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9320642&Exemplar=1&LAN=DE A1 Bosch, D. A1 Alba, P. Acosta A1 Kerdiles, S. A1 Benevent, V. A1 Perrot, C. A1 Lassarre, J. A1 Richy, J. A1 Lacord, J. A1 Sklenard, B. A1 Brunet, L. A1 Batude, P. A1 Fenouillet-Beranger, C. A1 Lattard, D. A1 Colinge, J. P. A1 Balestra, F. A1 Andrieu, F. YR 2019 K1 Doping K1 Annealing K1 Three-dimensional displays K1 Silicon K1 Transistors K1 Semiconductor lasers K1 Grain size K1 3D monolithic integration K1 Junction-less transistor K1 poly-si K1 nanosecond laser SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/S3S46989.2019.9320642 DO https://doi.org/10.1109/S3S46989.2019.9320642 SF ELIB - SuUB Bremen
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