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Reliability of a DME Ru Semidamascene scheme with 16 nm wid..:

, In: 2021 IEEE International Reliability Physics Symposium (IRPS),
Lesniewska, A. ; Pedreira, O. Varela ; Lofrano, M.... - p. 1-6 , 2021
Link: https://doi.org/10.1109/IRPS46558.2021.9405192