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1 Ergebnisse
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Finding the critical impact energy for micro debris generat..:
, In:
2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Pagani, L. Gaffuri
;
Guerinoni, L.
;
Falorni, L.
.. - p. 1-4 , 2021
Link:
https://doi.org/10.1109/INERTIAL51137.2021.9430462
RT T1
2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
: T1
Finding the critical impact energy for micro debris generation in MEMS inertial sensors
UL https://suche.suub.uni-bremen.de/peid=ieee-9430462&Exemplar=1&LAN=DE A1 Pagani, L. Gaffuri A1 Guerinoni, L. A1 Falorni, L. A1 Fedeli, P. A1 Langfelder, G. YR 2021 SN 2377-3480 K1 Micromechanical devices K1 Electrodes K1 Inertial sensors K1 Stability analysis K1 Optical sensors K1 Leakage currents K1 Monitoring K1 MEMS K1 inertial sensors K1 chipping K1 stability SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL51137.2021.9430462 DO https://doi.org/10.1109/INERTIAL51137.2021.9430462 SF ELIB - SuUB Bremen
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