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On-Wafer Electronic Layer Detectors Array (ELDA) for e-beam..:

, In: 2021 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA),
Wang, Chien-Ping ; Lin, Bum Jeng ; Shih, Jiaw-Ren... - p. 1-2 , 2021
Link: https://doi.org/10.1109/VLSI-TSA51926.2021.9440046