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1 Ergebnisse
1
The control of material surface condition for plasma techno..:
, In:
2021 International Conference on Electronics Packaging (ICEP)
,
Hironiwa, Daisuke
;
Morikawa, Yasuhiro
;
Kagami, Tsuyoshi
... - p. 125-126 , 2021
Link:
https://doi.org/10.23919/ICEP51988.2021.9451951
RT T1
2021 International Conference on Electronics Packaging (ICEP)
: T1
The control of material surface condition for plasma technology to fabricate advanced packaging
UL https://suche.suub.uni-bremen.de/peid=ieee-9451951&Exemplar=1&LAN=DE A1 Hironiwa, Daisuke A1 Morikawa, Yasuhiro A1 Kagami, Tsuyoshi A1 Kurimoto, Takashi A1 Horita, Kazumasa A1 Kamimura, Ryuichiro YR 2021 K1 Shape K1 Process control K1 Production K1 Packaging K1 Writing K1 Plating K1 Surface roughness K1 advanced packaging K1 plasma dry technology K1 surface condition control SP 125 OP 126 LK http://dx.doi.org/https://doi.org/10.23919/ICEP51988.2021.9451951 DO https://doi.org/10.23919/ICEP51988.2021.9451951 SF ELIB - SuUB Bremen
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