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1 Ergebnisse
1
A Kirigami MEMS Velocity Acoustic Transducer:
, In:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
,
Oh, Sangmin
;
Davaji, Benyamin
;
Richie, James
.. - p. 1319-1322 , 2021
Link:
https://doi.org/10.1109/Transducers50396.2021.9495502
RT T1 <cTitle>2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)</cTitle>: T1 <Title>A Kirigami MEMS Velocity Acoustic Transducer</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9495502&Exemplar=1&LAN=DE A1 Oh, Sangmin A1 Davaji, Benyamin A1 Richie, James A1 Lal, Amit A1 Lee, Chung Hoon YR 2021 SN 2167-0021 K1 Micromechanical devices K1 Transient response K1 Actuators K1 Acoustic transducers K1 Sensitivity K1 Silicon nitride K1 Frequency response K1 kirigami K1 ribbon K1 microphone K1 acoustic SP 1319 OP 1322 LK http://dx.doi.org/https://doi.org/10.1109/Transducers50396.2021.9495502 DO https://doi.org/10.1109/Transducers50396.2021.9495502 SF ELIB - SuUB Bremen
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