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1 Ergebnisse
1
A MEMS ACCELEROMETER WITH A SINGLE AXIS TWO PROOF MASSES FO..:
, In:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
,
Uchiyama, Akihiro
;
Ichikawa, Takashi
;
Shibata, Kohei
... - p. 112-115 , 2021
Link:
https://doi.org/10.1109/Transducers50396.2021.9495507
RT T1 <cTitle>2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)</cTitle>: T1 <Title>A MEMS ACCELEROMETER WITH A SINGLE AXIS TWO PROOF MASSES FOR A WIDE DETECTION RANGE</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9495507&Exemplar=1&LAN=DE A1 Uchiyama, Akihiro A1 Ichikawa, Takashi A1 Shibata, Kohei A1 Iida, Shin-ichi A1 Lee, Sangyeop A1 Ishihara, Noboru A1 Machida, Katsuyuki A1 Masu, Kazuya A1 Ito, Hiroyuki YR 2021 SN 2167-0021 K1 Accelerometers K1 Micromechanical devices K1 Actuators K1 Sensitivity K1 Transducers K1 Sensors K1 Reliability K1 micro-G K1 wide detection range K1 MEMS accelerometer K1 gold proof mass SP 112 OP 115 LK http://dx.doi.org/https://doi.org/10.1109/Transducers50396.2021.9495507 DO https://doi.org/10.1109/Transducers50396.2021.9495507 SF ELIB - SuUB Bremen
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