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1 Ergebnisse
1
A High-Sensitivity Mems Gravimeter without a Vacuum Chamber:
, In:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
,
Xu, XiaoChao
;
Wang, Qian
;
Tian, Ji'ao
... - p. 226-229 , 2021
Link:
https://doi.org/10.1109/Transducers50396.2021.9495620
RT T1 <cTitle>2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)</cTitle>: T1 <Title>A High-Sensitivity Mems Gravimeter without a Vacuum Chamber</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9495620&Exemplar=1&LAN=DE A1 Xu, XiaoChao A1 Wang, Qian A1 Tian, Ji'ao A1 Fang, YanYan A1 Yang, LuJia A1 Zhao, Chun A1 Hu, Fangjing A1 Tu, Liangcheng YR 2021 SN 2167-0021 K1 Micromechanical devices K1 Earth K1 Microelectromechanical systems K1 Correlation K1 Vacuum systems K1 Transducers K1 Buoyancy K1 Micro-electromechanical system (MEMS) K1 Gravimeter K1 Air buoyancy K1 Earth tides SP 226 OP 229 LK http://dx.doi.org/https://doi.org/10.1109/Transducers50396.2021.9495620 DO https://doi.org/10.1109/Transducers50396.2021.9495620 SF ELIB - SuUB Bremen
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